Dopant Profile Rs Calculator

Calculate semiconductor dopant profiles and sheet resistance using Gaussian or ERFC models. Switch between Forward and Reverse modes depending on your known parameters.

Enter process conditions to calculate profile parameters (Gaussian profile)

Forward Mode Inputs
Enter process conditions to calculate profile parameters

One-sided Gaussian profile for drive-in diffusion or ion implant

Toggle to enter surface and background concentrations

cm^-3

Maximum dopant concentration at the surface

Choose Dt for drive-in profiles or deltaRp for implant profiles

cm^2

Diffusion coefficient times time

um

Grid spacing for numerical integration

Results
Enter inputs to see calculated results
Waiting for calculation...
Gaussian Profile
Concentration vs. Depth
Enter inputs to generate profile